陳澤潤 Chen, Tse-Jun
Senior Research Engineer
辦公室: ASMAB 1020
電子信箱:
tjchen
asiaa.sinica.edu.tw
研究興趣
My research are mainly related to superconductivity devices. The fabrication of SIS mixers for SMART telescopes and the development of new fabricating process are my major works. I also manage the operation of the clean room at NTHU from 2003 to 2013.and Since 2014 the mixer chip lab was moved from NTHU to NTU. Now We have three sputter systems, DUV mask aligner, and ICP-RIE system in the laboratory.
The fabricating process of SIS mixers with quantum noise limit performance for the frequency range 150GHz-850GHz has been developed. Since May 2016, we start to develop a new mixer structure Nb/Al/AlOx/Al/Nb, we found it can get better good quality ,high Jc and easy Jc control than old structure. we changed the top Al layer thickness and reduced the oxidiation level to get a 24KA/cm^2 Jc and over 10 quality factor(lot no.: SAO240-1-7). it broken the Jc record on this lab. But it still has low gap voltage problem, we continue to figure out it. Many kinds of processes can be done in our laboratory that could lead to the development of novel devices for Taiwan and worldwide research groups. To keep the operation of laboratory and mixer chip process smoothly is my major job.
